Exclusive: How China built its ‘Manhattan Project’ to rival the West in AI chips
In a high-security Shenzhen laboratory, Chinese scientists have built what Washington has spent years trying to prevent: a prototype of a machine capable of producing the cutting-edge semiconductor chips that power artificial intelligence, smartphones and weapons central to Western military dominance, Reuters has learned.
Completed in early 2025 and now undergoing testing, the prototype fills nearly an entire factory floor.
It was built by a team of former engineers from Dutch semiconductor giant ASML who reverse-engineered the company's extreme ultraviolet lithography machines or EUVs, according to two people with knowledge of the project.
China's machine is operational and successfully generating extreme ultraviolet light, but has not yet produced working chips, the people said.
In April, ASML CEO Christophe Fouquet said that China would need "many, many years" to develop such technology. But the existence of this prototype, reported by Reuters for the first time, suggests China may be years closer to achieving semiconductor independence than analysts anticipated.
Nevertheless, China still faces major technical challenges, particularly in replicating the precision optical systems that Western suppliers produce.
The breakthrough marks the culmination of a six-year government initiative to achieve semiconductor self-sufficiency, one of President Xi Jinping's highest priorities. While China's semiconductor goals have been public, the Shenzhen EUV project has been conducted in secret, according to the people.
The project falls under the country's semiconductor strategy, which state media has identified as being run by
Xi Jinping confidant Ding Xuexiang, who heads the Communist Party's Central Science and Technology Commission.
CHINA'S MANHATTAN PROJECT
One veteran Chinese engineer from ASML recruited to the project was surprised to find that his generous signing bonus came with an identification card issued under a false name, according to one of the people, who was familiar with his recruitment.
Once inside, he recognized other former ASML colleagues who were also working under aliases and was instructed to use their fake names at work to maintain secrecy, the person said. Another person independently confirmed that recruits were given fake IDs to conceal their identities from other workers inside the secure facility.
The team includes recently retired, Chinese-born former ASML engineers and scientists—prime recruitment targets because they possess sensitive technical knowledge but face fewer professional constraints after leaving the company, the people said.
Two current ASML employees of Chinese nationality in the Netherlands told Reuters they have been approached by recruiters from Huawei since at least 2020.
The ASML veterans made the breakthrough in Shenzhen possible, the people said. Without their intimate knowledge of the technology, reverse-engineering the machines would have been nearly impossible.
Their recruitment was part of an aggressive drive China launched in 2019 for semiconductor experts working abroad, offering signing bonuses that started at 3 million to 5 million yuan ($420,000 to $700,000) and home-purchase subsidies, according to a Reuters review of government policy documents.
Recruits included
Lin Nan, ASML's former head of light source technology, whose team at the Chinese Academy of Sciences' Shanghai Institute of Optics has filed eight patents on EUV light sources in 18 months, according to patent filings.
Two additional people familiar with China’s recruitment efforts said some naturalized citizens of other countries were given Chinese passports and allowed to maintain dual citizenship.
China officially prohibits dual citizenship and did not answer questions on issuing passports.
INSIDE CHINA'S EUV FAB
ASML's most advanced EUV systems are
roughly the size of a school bus, and weigh 180 tons. After failed attempts to replicate its size, the prototype inside the Shenzhen lab became many times larger to improve its power, according to the two people.
The Chinese prototype is crude compared to ASML's machines but operational enough for testing, the people said.
China's prototype lags behind ASML's machines largely because researchers have struggled to obtain optical systems like those from Germany's Carl Zeiss AG, one of ASML's key suppliers, the two people said.
The Changchun Institute of Optics, Fine Mechanics and Physics at the Chinese Academy of Sciences (CIOMP) achieved a breakthrough in integrating extreme-ultraviolet light into the prototype's optical system, enabling it to become operational in early 2025, one of the people said, though the optics still require significant refinement.CIOMP did not respond to requests for comment.
In a March online recruitment call on its website, the institute said it was offering "uncapped" salaries to PhD lithography researchers and research grants worth up to 4 million yuan ($560,000) plus 1 million yuan ($140,000) in personal subsidies.
Export-restricted components from Japan’s Nikon and Canon are being used for the prototype, one of the people and an additional source said.
HUAWEI SCIENTISTS SLEEP ON-SITE
While the EUV project is run by the Chinese government, Huawei is involved in every step of the supply chain from chip design and fabrication equipment to manufacturing and final integration into products like smartphones, according to four people familiar with Huawei’s operations.
CEO Ren Zhengfei briefs senior Chinese leaders on progress, according to one of the people
Huawei has deployed employees to offices, fabrication plants, and research centers across the country for the effort. Employees assigned to semiconductor teams often sleep on-site and are barred from returning home during the work week, with phone access restricted for teams handling more sensitive tasks, according to the people.
Inside Huawei, few employees know the scope of this work. "The teams are kept isolated from each other to protect the confidentiality of the project," one of the people said. “They don't know what the other teams work on.”